導電性Si_3N_4結合TiNセラミックスの開発と特性評価

概要

論文の詳細を見る
Electro-conductive Si_3N_4 bonded TiN ceramics were successfully produced by sintering green compacts composed of Si and TiN powders in nitrogen gas atmosphere. These ceramics showed little dimensional change in the sintering stage, which was very favorable to get near-net-shape ceramic components in as-sintered state. Si and TiN powders were mixed in a ball mill and molded using thermoplastic resin binder. The green body was dewaxed and then sintered in 0.88 MPa nitrogen gas atmosphere. The dimensional change in the sintering stage was under 0.3%, and electrical resistivity of 26μΩm was obtained when TiN content was 70 vol% . The bending strength of 460 MPa was obtained for the ceramics containing 20 vol%of TiN. Other properties of these ceramics, such as hardness, thermal expansion coefficient and oxidation resistance,
社団法人日本セラミックス協会の論文
1989-02-01