Si-SiO-C 混合粉末より作製したSi_3N_4-SiC 複合セラミックスの微構造

概要

論文の詳細を見る
We investigated the Si_3N_4-SiC ceramics prepared from Si-SiO-C mixed powder compacts. Si_3N_4 matrix and SiC particles were formed during the sintering process in the ceramics. During heat treatment at 1350℃ in Ar, SiC particles were formed first and, after nitridation at 1400℃, self-composed Si_3N_4-SiC ceramics were obtained. In these ceramics, SiC particles about 100 nm in diameter were dispersed in Si_3N_4 matrix particles. Yttrium which originate from sintered aide (Y_2O_3) was detected at the grain boundary between Si_3N_4 matrix and SiC particles intragranularly dispersed in the matrix. It is suggested that the SiC particles were dispersed in the Si_3N_4 during the α→β transformation or the grain growth of Si_3N_4 grains. Thermogravimetry (TG) and differential thermal analysis (DTA) results suggested that SiO and CO gases were concerned in the formation of the SiC particles.
社団法人日本セラミックス協会の論文
1998-08-01