Si_3N_4で結合した導電性ZrNセラミックスの開発と特性評価

概要

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Electro-conductive Si_3N_4 bonded ZrN ceramics with 15-30% porosity were produced by sintering green compacts of Si and ZrN powders in nitrogen gas atmosphere. Si and ZrN powders were mixed and molded using thermoplastic resin binder. The amount of ZrN was varied from 20 to 70 vol%. The green bodies were dewaxed and sintered in the 0.88 MPa nitrogen gas atmosphere. Si particles changed into Si_3N_4 and the Si_3N_4 connected ZrN particles in the green compacts. The dimensional change in sintering stage was under 0.2% for each sample. The ceramics containing 20 vol% of ZrN showed electrical resistivity of 1X 10^<-3>Ω・m, bending strength of 370 MPa and a thermal expansion coefficient of 3.4 X10^<-6>℃^<-1>. A lower electrical resistivity of 9 X 10^<-6> Ω・ m was obtained when ZrN content was 70 vol%, but its bending strength was decreased to 120 MPa.
社団法人日本セラミックス協会の論文
1989-07-01