ホウ素ゾープ高純度炭化ケイ素セラミックスの焼結性と特性に及ぼす酸化ベリリウム添加の影響

概要

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In order to obtain pressureless-sintered SiC ceramics with high thermal conductivity, effect of BeO addition on sintering properties boron-doped β-SiC powder was investigated. The β-SiC powder was produced by the plasma arc method from SiH_4, B_2H_6 and CH_4 gases. Pressureless-sintered boron-doped β-SiC ceramics showed high thermal conductivity of 180 W・m^<-1>・K^<-1> and electrical resistivity of 1100Ω・m (10 mV). On the other hand, pressureless-sintered boron-doped β-SiC ceramics containing BeO showed varistor characteristics with electrical resistivity of 10^<11> Ω・m at 10 V, and thermal conductivity of 230 W・m^<-1>・K^<-1>. These ceramics consisted of net-like elongated β-SiC grains. Thus, addition of BeO increased the thermal conductivity and electrical resistivity.
社団法人日本セラミックス協会の論文
1995-04-01