低温加圧プロセスを用いたアルミニウム成形体の直接窒化

概要

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Complete nitridation of aluminum compacts was achieved at temperatures from 580 to 600℃(lower than the melting point of aluminum)and under a pressured nitrogen atmosphere of 1 and 4 MPa. The structure of the generated aluminum nitride compact was strongly dependent of reaction condition. In the case of preheating in low vacuum or reaction under a low nitrogen pressure, a rather uniform structure was generated. On the other hand, in the case preheating in high vacuum and reaction under a high nitrogen pressure, the generated structure consisted of three layers:two dense outer layers and a porous inner layer. Melting of aluminum was not observed during nitridation when the uniform structure was generated, which suggests that the nitridation proceeded as a solid-gas reaction.
社団法人日本セラミックス協会の論文
1999-05-01