Lu_2Si_2O_7コーティングによる窒化ケイ素の高温酸化抑制効果

概要

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Lutetium disilicate (Lu_2Si_2O_7) layer of 4-12 μm in thickness with a small amount of silica (SiO_2) phase was coated on silicon nitride (Si_3N_4) by reaction sintering after dip coating. The oxidation resistance and flexural strength of the coated sample were investigated and compared with those of the uncoated one. After cycling oxidation at 1500℃ for up to 100 h in air, the total weight gain of the coated sample was almost half that of the uncoated one, indicating that oxidation resistance of Si_3N_4 was improved by about 100%. The flexural strength of the coated sample was not deteriorated in comparison with that of the uncoated one, and it was also maintained after the cycling oxidation at 1500℃ for 100 h in air. Those physical and chemical stabilities can be attributed to the presence of Lu_2Si_2O_7 layer, which effectively prevents oxidation of Si_3N_4 at high temperature.
社団法人日本セラミックス協会の論文
2004-05-01