窒化アルミニウムの焼結過程と熱伝導率に及ぼす粉末特性の影響

概要

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The sinterability and thermal conductivity of Y_2O_3 doped AlN powders with diverse specific surface areas (42-2.9 m^2g^<-1> and oxygen contents (0.2-2 mass%) were evaluated. It was found that sintering of fine powders induces the densification at lower processing temperatures, and for raw AlN powders with specific surface area larger than 20 m^g^<-1> and oxygen content higher than 1.1 mass%, densified specimens were obtained by sintering at 1650°C for 4h. However, the result thermal conductivity of AlN specimens fabricated from fine powders was extremely lower than the theoretical thermal conductivity of AlN, at a level of 80 Wm^<-1>K^<-1>. The deterioration of the thermal conductivity has been attributed to the agglomeration of primary particles, and to subsequent formation of oxygen related defect in grown AlN grains occurring at an early stage of sintering.
1995-09-01