Effects of Oxygen Impurity and of Heat-Treatment on Thermal Diffusivity of Sputtered SiC Film
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概要
- 論文の詳細を見る
Thermal diffusivities of sputtered SiC thin films were measured by using accalorimetric method. X-ray diffractions showed that the as-sputtered samples were inamorphous state and the thermal diffusivity of the SiC thin film was 0.40 cm'/ s, Afterheat-treatment at 400'C for 5 hours in argon gas, there occured recrystallization andthen the thermal diffusivity increased to be 0.62 cm'/ s. Furthermore, the effect ofSin. impurity on thermal diffusivity xvas investigated. The impurit)z acting as a sourceof oxygen supply decreased the heat conductivity.
- 社団法人日本物理学会の論文
- 1990-12-15
著者
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Yoshiko H.
Faculty of Science and Engineering,Keio University
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FUKUCHI Mitsuru
Faculty of Science and Engineering,Keio University
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OHASHI Kazutoshi
Faculty of Engineering,Tamagawa University
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Fukuchi M
Department Of Instrumentation Engineering Faculty Of Science And Technology Keio University
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Fukuchi Mitsuru
Department Of Instrumentation Engineering Faculty Of Science & Technology Keio University
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Fukuchi Mitsuru
Keio University
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Fukuchi M
Keio Univ. Kanagawa
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OHASHI Yoshiko
Department of Instrumentation Engineering,Faculty of Science and Technology,Keio University
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UMEZAWA Tomokazu
Faculty of Science and Technology,Keio University
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OYAMA Masanori
Department of Electronics,Tokyo National College of Technology
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KATO Makio
Department of Electronics,Tokyo National College of Technology
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Yoshiko H.
Department Of Instrumentation Engineering Faculty Of Science And Technology Keio University
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Ohashi Yoshiko
Faculty Of Engineering Keio University
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Kato Makio
Department Of Electrical Engineering Tokyo National College Of Technology
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Kato Makio
Department Of Electronics Tokyo National College Of Technology
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Oyama Masanori
Department Of Electronics Tokyo National College Of Technology
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Ohashi K
Department Of Electrical And Electronic Engineering Faculty Of Engineering Okayama University
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Ohashi Kazutoshi
Faculty Of Engineering Tamagawa University
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Umezawa T
Teijin Ltd. Hiroshima Jpn
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