粗粒ダイヤモンド砥石によるファインセラミックの超平滑研削 : 研削油剤の効果(続報)

概要

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In the report, the effect of grinding fluid on the newly devised ultra-smoothness grinding of silicon carbide and silicon nitride ceramics using the #140 diamond wheel is examined additionally following the previous report on the ultra-smoothness grinding of silicon carbide. The three types of grinding fluids are used for the examination. The main results obtained are as follows : (1) Grinding fluid supply is effective for the ultra-smoothness grinding of. silicon nitride ceramic as well as silicon carbide ceramic (2) The type and dilution of grinding fluid have the great influence on surface roughness in ultra-smoothness grinding of those ceramics. It is important to select the suitable grinding fluid for obtaining the ultra-smoothness surface. (3) Supplying the suitable grinding fluid, the surface smoothness of silicon nitride ceramic in measuring area of 256μm x 256μm attains below 60nm (Rz) or 3nm (Ra).
公益社団法人精密工学会の論文
2004-11-05