圧電セラミック素子のナノ変位手段としての基礎特性測定

概要

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A measuring method using a newly developed laser diode probe for dynamic and static nano-displacement characteristics of a ceramic piezo-element was studied. A beam from the probe is exposed in focus at the surface of the sample and the reflected beam is detected. The probe, being applicable to a rather rough surface of a material, can read nano-displacements by detecting the diffraction signal of the reflected beam. A soft ceramic material, PCM-33A (Pb Mg Nb Ti ZrO), 2mm thich 31×15mm was suspended at the center by needles and the LE and TE were measured.The piezo-electric constants obtained by this method applying DC pulses are d_<31>=-410×10^<-12>m/V and d_<33>=1300×10^<-12>m/V, which are about twice those by the conventional electric method.Large resonance peaks at 47kHz for 31mm LE and 107kHz for 15mm LE are measured showing a complete coinsidence to those obtained by the conventional electrical measurement method. This direct displacement measurement method may become usefull to measure and describe the mechanical displacement characteristics of a piezo-element as mechanical moving means.
1993-09-05