粗粒ダイヤモンド砥石によるファインセラミックの超平滑研削 : 研削油剤の効果

概要

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The high removal rate ultra-smoothness grinding method of ceramics, which can finish to almost the same smoothness formed by polishing has been recently desired strongly for high efficiency production of high quality ceramic components. In our previous researches, the newly devised ultra-smoothness grinding method is proposed and ascertained to be useful for finishing to near the ultra-smoothness surface. Using the method in the surface grinding with #140 diamond wheel, the surface roughness of cemented carbide tool is found to attain below 30nm (Rz)_<3D> or 5nm (Ra)_<3D>. Using the method, in this report, the influence of the grinding fluid on ultra-smoothness grinding of ceramic is examined. The fine ceramic used is hot pressed silicon carbide (HPSC). The metal bonded diamond wheel of the coarse #140 grain size and the concentration of 50, and the three types of grinding fluids are used in the experiment. For the ultra-smoothness grinding of ceramics, wet grinding is much more effective than dry grinding, because the rough surface roughness be caused in dry grinding by thermal softening of the surface layer likely. The type and dilution of grinding fluid have the large influence on surface roughness in ultra-smoothness grinding of ceramics. Supplying the suitable grinding fluid, the surface smoothness of HPSC ceramic attains below 48nm (Rz)_<3D> or 2.4nm (Ra)_<3D>.
公益社団法人精密工学会の論文
2004-06-05