高出力レーザビーム整形のためのマルチレベル銅CGHの製作

概要

論文の詳細を見る
A multilevel computer generated hologram (CGH) was fabricated for shaping a laser beam profile of a high-power CO_2 laser. The surface relief has eight height levels with 0.94μm in step heights. A copper surface relief was formed on a flat copper substrate by electroplating with photo-resist masks. Standard deviation of the surface step height was less than 22% of the designed height. The CGH changes a CO_2 laser beam of 14mm in diameter to a rectangular beam of 1mm×4mm and its diffraction efficiency was 69.2%. A 200W CO_2 laser beam of 14mm in diameter did not damage the CGH surface.
社団法人精密工学会の論文
2004-09-05