水の分解生成物を利用したレーザクリーニング

概要

論文の詳細を見る
Water is decomposed by ArF excimer laser irradiation and decomposed products contain radicals and so on. We propose a new blind hole cleaning technique by those decomposed products. This technique can clean the surface without direct laser irradiation. Therefore we applied to blind hole cleaning. Specifically, water was filled into the blind hole then the laser was irradiated to the water. Firstly, decomposed products were investigated by (1) spectroscopy (2) redox titration (3) etching various metals. Secondly blind hole cleaning was examined. As a result, (1) H and O_2^+ peaks were observed in the emission spectrum. (2) Discolor was recognized by inletting KI and KMnO_4 to the water just after laser irradiation. (3) Decomposed products were affected to zinc, nickel and copper plates by placing parallel to the laser beam. As a result, zinc was etched and mass was decreased. Mass decrease was not recognized in the case nickel and copper. These results revealed that water was decomposed by the laser irradiation, and decomposed products were oxidative. Tapping oil on SUS304 steel was cleaned 5mm around focus point by the laser irradiation. Tapping oil on the sidewall of the blind hole was removed.
公益社団法人精密工学会の論文
2004-06-05