光ファイバーを用いた点回折干渉計に関する研究

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Recently, the technological innovation using the extreme ultraviolet wavelength with high brightness of synchrotron radiation is actively advanced. In order to effectively utilize such light, it is important to develop the technology that produces and evaluates the optical element with surface accuracy over the 2 digits compared to conventional visible light. In the conventional interferometer, the aberration between the test surface and the standard reference surface is measured. Therefore, the accuracy of standard surface determines the measurement accuracy. To achieve the absolute measurement accuracy, it is necessary to develop a new interferometer that has inherent very high accuracy. The point diffraction interferometer is based on diffraction, which permits the generation of a perfect spherical wave front by using a circular aperture with a radius comparable to the wavelength of light. The purpose of this study is to examine point diffraction interference system for the profile measurement sensor, which can be also utilized for alignment of the EUV optical system. The optical system is consisted of single-mode optical fiber and the fringe scanning using the laser source of visible light. In this report, the effect of arrangement of optical system, sphericity of wave front, surface quality of optical fiber end surface and diffraction noise of imaging lens system etc., on measurement error was mainly examined.
社団法人精密工学会の論文
2003-08-05

光ファイバーを用いた点回折干渉計に関する研究

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