2ピッチ格子投影による3次元形状計測

概要

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The surface profile is obtained by projecting grating pattern on the object surface and observing the deformed pattern at the direction different from the projection. Phase-shifting technique is generally used for measuring height distribution at all the picture elements over the object image. In this method, if the slope of the object surface is so steep that the phase change between any adjacent pixels is larger than, the integer fringe orders become ambiguous and the profile cannot be determined. In this paper, a new method for measuring steep slopes is proposed and verified by experiments. In the method , two gratings with different effective pitches P_1 and P_2 are projected on the object. By subtracting the two calculated heights for the two pitches, the integer fringe orders are obtained. Simulations clarified the effect of intensity quantization on the counting error of fringe order.
公益社団法人精密工学会の論文
1992-05-05