基準を必要としない形状測定法の研究 : 平面形体の円周上でのフィゾー干渉計による測定実験

概要

論文の詳細を見る
This paper describes a measurement of surface flatness along a circle with no standard. For the measurement, distances of the space betveen two unknown surfaces located almost in parallel are measured along a circle. One of the surfaces is rotated around the center of the circle and the distances are measured agairL. This procedure is repeated many times. The profiles of two sm : faces along a circle are calculated from these data. Validity of this measuring principle was proved by computer simulations and simple measuring experiments in the former paper. In this study the principle is applied to measurement using a Fizeau interferometer with He-Ne laser. For the purpose, a high precision mirror and a metal-coated glass are used for the upper and lower reflection surfaces respectively. Their profiles are unknown. The distances between two surfaces are obtained by the interference fringes. Fourier transform method is used to obtain the distances smaller than one fringe. Two profiles are calculated from the data. Profile measurements are carried out four times using four different metal-coated glass plates as the lower surface and a precise mirror as the upper surface. The measured profiles of the precise mirror obtained by these proccdures agree well with a deviation of about 2nm.
公益社団法人精密工学会の論文
1999-02-05