光干渉法による大段差のナノメートル計測

概要

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This paper describes a high precision measurement technique to obtain a step height of optical parts which have large steps on the surfaces. In this study, a technique was developed with which steps of a few millimeter height can be measured in the accuracy of the order of a few nanometers. In the first step, white light interferometry is adopted to obtain a coarse value on the order of sub-microns, then heterodyne laser interferometry (with a Zeeman type He-Ne laser) is adopted to acquire the precise value on the order of a few nanometers. In the latter system, the rays reflected at the uppdr and lower side of the step are made to interfere. In order to obtain the two parallel beams, two Wollaston prisms are introduced. This system expands the dynamic range and brings the easy beam alignment. The experiment results show that the accuracy in the order of a few nanometers is achieved for the measurement of as large as a few millimeters.
公益社団法人精密工学会の論文
1993-05-05