レーザ誘起熱変形によるプラスチック・マイクロレンズの作製

概要

論文の詳細を見る
Microlens is a key component in the fields of optical communication, data storage and digital display. Integration of microlenses and optical devices is also required for weight saving, reduction in assembly cost and higher accurate alignment. This paper deals with the development of a novel method to fabricate spherical microlenses and microlens arrays. In this method, microlenses are formed on the surface of acrylate resin which is used as sealing material for the optical devices such as photodetectors, laser diodes, CCD image sensors and so on. Microlenses are fabricated under several conditions, and the influences of process parameters on the dimension of microlenses are investigated. The fabricated microlens and microlens array have the appropriate shape, surface finish and alignment so as to condense light.
公益社団法人精密工学会の論文
2003-10-05