タッピングスタイラスにおける計測力の一推定法

概要

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A new technique to estimate the measurement force caused by a topographic measurement system using a microfork (tapping stylus) is proposed. Although Hertz model has been used to estimate the repulsive force of AC-mode AFM probes, precise constants such as Young's moduli and radius of the probe tip are required to calculate the force. In this paper, the microfork is modeled by a spring-dumper system with an effective mass. Samples are also modeled by a passive spring-dumper system. Then experimental results of the near field characteristics and the motion of the microfork obtained by a numerical simulation are compared. The spring constant and the dumping coefficient obtained from the simulations are fltted to those of expermantal results. Then the tapping force can be estimated by numerical simulations using the two parameters.
公益社団法人精密工学会の論文
2001-04-05