電磁的加工圧付加型形状転写装置による水晶振動子の高能率製作法

概要

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Electro-magnetically enforced rotary barrel finishing system has been developed for finishing rectangular quartz crystal blanks into lens-like shape (bi-convex). In our previous works, the fixed abrasive method, in which abrasive papers are used instead of powder abrasives, has been introduced as a new finishing method for fabricating the bi-convex type rectangular quartz crystal blanks. Our previous works also have shown that, the use of the fixed abrasive method make possible to realize accurate shape transferring, dustless clean working environment, and shortening process time (20 hours for complete shape transferring). In this paper, we have developed an electro-magnetically enforced rotary barrel finishing system for finishing the rectangular quartz blanks into bi-convex within a shorter process time. It can be reasonably expected that the use of electro-magnets generate additional machining pressure, and enable to further shorten the process time. As a result, almost complete shape transferring has been realized by 9 hours processing, which corresponds 45% of previous process time. Shape and frequency responses of the fabricated resonators have also been measured and discussed.
公益社団法人精密工学会の論文
2004-11-05