圧電素子と感温磁性体からなる光駆動走行マシン

概要

論文の詳細を見る
Optical micro-machines have such features as easily miniaturized in fabrication sizes and as controlled by optical energy supplied in wireless from a remote point. It is proposed that an optically driven moving machine moves like a caterpillar on the basis of optoelectronic principles. It consists of two parts such as a body part made of a spring and temperature sensitive ferrite and feet part made of piezoelectric devices (PZT). The feet can hold the floor with an electrostatic absorbing force caused by piezoelectric effect of PZT by beam projection. The body can expand and contract with a magnetic force change between a temperature sensitive ferrite and a permanent magnet caused by beam projection. Two machines whose total sizes of length and width are 38 × 16 mm and 10 × 5 mm are fabricated in trial. It proved experimentally that they could move as slowly as l.Omm/s and 0.4mm/s respectively.
社団法人精密工学会の論文
1998-10-05