非線形濃度フィルタを用いた変位計測の研究

概要

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Recently many trials have been proposed in displacement measurements using optical methods, and various apparatus based on optical triangulation are available on the market because of their simple and clear characteristics. In these apparatus a PSD (Position Sensitive Device) is used for the detection of displacement. However, the relation between the displacement of the object and output signal from the PSD is not linear. Therefore the output signal has to be corrected by an electric circuit for detecting the true displacement. In this research a new method is proposed for measuring displacement which utilizes a PD (Photo Detector) and a non-linear density filter instead of a PSD. This method brings linear relation between the displacement of the object and output signal from the PD. For the realization of a practical system, the output uniformity of the PD and the non-linear density filter are examined from the view point of design and producibility. Experimental results by a prototype apparatus verify the principle of this method has satisfactory linearity.
公益社団法人精密工学会の論文
1991-10-05