局所サンプリング位相シフト法を用いた表面形状計測

概要

論文の詳細を見る
Phase shifting interferometry is a highly precise technique to measure surface profiles without contact. However, when a very small phase difference is calculated, the quantization error can not be neglected. We propose a local sampling phase shifting technique for surface profile measurement to solve this problem. In this technique, a phase shifting is applied to part of sinusoidal interference fringe, and then the intensity in this area is increased up to emphasize a very small phase difference. By using this method, the influence of quantization including electric noise is eliminated and the surface profile can be measured more precisely. In this paper, the relation of phase error to fringe amplitude and measurement phase is simulated. As a result, the validity of this method is described by high sensitive surface profile measurement actually.
公益社団法人精密工学会の論文
1998-06-05