2次元最小2乗逐次3点法による平面形状誤差の測定

概要

論文の詳細を見る
A study is presented of measuring method for flat form errors by 2D least square serial 3 point method. This method is extensively improved on a serial 3 point method. Consequently, this approach can compensate the measuring errors which are caused by fluctuations of 9 displacement sensors implemented on a measuring head. Here, the measuring errors in this case are parallel motion errors and rotatory motion errors of the head. Furthermore, accidental errors which are involved in the measuring values are reduced by least square method. In experimental analysis, a laser interferometer is used as the measuring head. And the influence of form errors of reference surface are removed by calculating data. In this paper the following results are revealed by some simulations and several experiments. (a)The repeatability of this experiment is about 40 nm (2σ). (b)Measuring values of this method sufficiently coincide with those obtained by 2D least square serial 2 point method.
1992-06-05