グロー放電質量分析法による原子のイオン化効率

概要

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Matrix dependency of relative sensitivity factors (RSFs) in glow discharge mass spectrometry has been systematically investigated. RSFs were determined using pin-shaped and disk-shaped samples prepared from the same blocks. The matrices are Fe, Ni, AI, Cu and Ti, The numbers of elements (isotopes) whose RSFs were determined for both pin- haped and disk-shaped samples in the respective matrices are 38, 35, 24, 36 and 13. Using the method of least square, the RSFs for respective matrices are compared each other. There exists a strong correlation between the RSFs for the different matrices. Thus, the RSFs for a matrix can be transformed for other matrices by the simple multiplication of appropriate coefficients. The five sets of the values of the RSFs after transformation to Fe matrix agree each other. However, the coefficient for Al matrix is not equal to the value of the RSF of Al element in the relevant matrices. Furthermore, RSFs of Al afe dependent on concentrations for Fe matrix. It is also revealed that there exists a coelation between RSFs and sputtering yields. The correlation indicates that ion beams of elements which are easily sputtered are less observed. This result leads to a possibility that there exists another important process to determine RSFs besides Penning ionization process.