Nanoimprinting of Metallic Glass for Periodic Nano-Hole Structures with Dies Fabricated by FIB-CVD and RIE

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概要

• 論文の詳細を見る
• 2011-02-01

著者

• INOUE Akihisa

  Tohoku University

• Kimura Hisamichi

  Institute For Material Research Tohoku University

• Fukuda Yasuyuki

  Department Of Materials Chemistry Ryukoku University

• Fukuda Yasuyuki

  Department Of Materials Processing Graduate School Of Engineering Tohoku University

• SAOTOME Yasunori

  Osaka Center, Institute for Materials Research, Tohoku University

• Saotome Yasunori

  Osaka Center Institute For Materials Research Tohoku University

• Saotome Yasunori

  Inst. For Materials Res. Kansai Center Tohoku Univ.

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