Hydrogen Sensors Using Pd-Based Metallic Glassy Alloys
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概要
- 論文の詳細を見る
Pd-based metallic glassy alloys have been investigated as materials for the hydrogen sensors. We prepared thin films of Pd-Cu-Si alloy known as typical metallic glassy alloys by r. f. magnetron sputtering method. And then, we examined their sensitivity to hydrogen by measuring the change of electric resistance of thin films when they were exposed to hydrogen gases of various concentrations at 50°C and 100°C. As a result, Pd-Cu-Si metallic glassy alloys showed excellent property as materials for the hydrogen sensors.
- 社団法人 電気学会の論文
- 2008-05-01
著者
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KIMURA Hisamichi
Institute for Materials Research, Tohoku University
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木村 久道
東北大学金属材料研究所
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YUBUTA Kunio
Institute for Materials Research, Tohoku University
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INOUE Akihisa
Tohoku University
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YAMAURA Shin-ichi
Institute for Materials Research, Tohoku University
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Yamaura Shin-ichi
Institute For Materials Research Tohoku University
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Yubuta Kunio
Institute For Materials Research Tohoku University
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Kajita Susumu
Advanced Technologies Fusion Laboratory Matsushita Electric Works Ltd.
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Yamaura S
Inst. For Materials Res. Tohoku Univ.
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Kimura Hisamichi
Institute Of Materials Research Tohoku University
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Kimura Hisamichi
Institute For Material Research Tohoku University
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Inoue Akihisa
Wpi Tohoku University
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Kajita Susumu
Advanced Materials Development Department Panasonic Electric Works Co. Ltd.
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Yamamura Shin-ichi
Institute For Materials Research Tohoku University
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