可変自然長ばねモデルと外乱オブザーバに基づくボールねじ駆動ステージの非線形摩擦補償

概要

論文の詳細を見る
Ball screw driven stages are used for industrial equipments such as machine tools and semiconductor equipments. Fast and precise positioning is necessary to enhance productivity and microfabrication technology of the system. The rolling friction of the ball screw driven stage deteriorate the positioning performance. Therefore, the control system based on the friction model is necessary. In this paper, we propose variable natural length spring model (VNLS model) as the friction model. VNLS model is simple and easy to implement as friction controller. Next, we propose multi variable natural length spring model (MVNLS model) as the friction model. MVNLS model can represent friction characteristic of the stage precisely. Moreover, the control system based on MVNLS model and disturbance observer is proposed. Finally, the simulation results and experimental results show the advantages of the proposed method.
社団法人電気学会の論文
2009-11-01