ナノプロセス用電子ビーム多価イオン源の開発

概要

論文の詳細を見る
A novel electron beam ion source was developed for nanoprocesses using highly charged ions. The ion source was designed to optimize the efficiency of ion production and extraction based on the trajectory calculations of electrons and ions traveling through the ion source. A commercial super-conducting magnet (Helmholz coils, 3 T) cooled by a closed-cycle refrigerator is used to reduce the operating costs. The separate vacuum chambers design enables 250°C baking of electrodes in the ion source to realize ultrahigh vacuum condition by removing the magnet chamber without venting.
日本真空協会の論文
2005-05-20