High Pressure Ar-N_2 RF Discharge With ICP Technique Using SIT Inverter Power Supply

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概要

• 論文の詳細を見る
• 2002-09-11

著者

• Razzak Abdur

  Department Of Energy Engineering And Science Graduate School Of Engineering Nagoya University

• Kondo Kenji

  Nagoya University

• Takamura Shuichi

  Faculty Of Medicine Toyama Medical And Pharmaceutical University

• Takamura S

  Graduate School Of Engineering Nagoya University

• TAKAMURA Shuichi

  Nagoya University

• RAZZAK Abdur

  Nagoya University

• UESUGI Yoshihiko

  Nagoya University

• Uesugi Y

  Faculty Of Engineering Kanazawa University

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