Fabrication of Carbon Nanostructure onto the Apex of Scanning Tunneling Microscopy Probe by Chemical Vapor Deposition

概要

論文の詳細を見る
Microwave plasma-enhanced chemical vapor deposition (MW-PECVD) has been applied to fabricate a novel scanning tunneling microscopy (STM) probe with carbon nanostructures on its apex. Prior to CVD growth, a platinum-paladium thin film (60 nm), as the catalyst, is coated on the apex of the conventional STM tip (made of tungsten, 0.3 mm $\phi$). The tip is positioned perpendicular to the electrode with a lightning conductor to avoid the bombardment of ions in the plasma. A mixed gas of CH4 and H2 is used in CVD and thousands of carbon nanorods are fabricated on the tip apex under the optimum conditions. It is demonstrated that the prepared probe can resolve an atomic lattice image of the graphite surface.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-07-15