Quantum Chemical Mechanism of Heterogeneous Reaction between Trichlorosilane and Adsorbed Water
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概要
- 論文の詳細を見る
- 2003-07-15
著者
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Nakamura Koichi
Department of Material Physics, Faculty of Engineering Science, Osaka University
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Tachibana Akitomo
Department Of Engineering Physics And Mechanics Kyoto University
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ISHIHARA Yoshio
NIPPON SANSO Corporation, Electronics Sales Division, Marketing Department
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MAKITA Toshiki
Department of Engineering Physics and Mechanics, Kyoto University
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MASUSAKI Hiroshi
NIPPON SANSO Corp. Tsukuba Laboratory
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MATSUMOTO Koh
NIPPON SANSO Corp. Tsukuba Laboratory
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