Development of Electrothermal Actuator with Optimized Motion Characteristics

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-06-30

著者

• Lin Yu-shen

  Asia Pacific Microsystems Inc.

• LEE Chengkuo

  Asia Pacific Microsystems, Inc.

• LAI Yen-Jyh

  Asia Pacific Microsystems, Inc.

• WU Chia-Yu

  Asia Pacific Microsystems, Inc.

• CHEN Chihchung

  Asia Pacific Microsystems, Inc.

• CHEN Wen-Chih

  Asia Pacific Microsystems, Inc.

• FANG Weileun

  Institute of MEMS, National Tsing Hua University

• HUANG Ruey-Shing

  Institute of Electronics Eng., National Tsing Hua University

• Lai Yen-jyh

  Asia Pacific Microsystems Inc.

• Chen W‐c

  National Cheng Kung Univ. Tainan Twn

• Lin Y‐s

  National Dong Hwa Univ. Hualien Twn

関連論文

• Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator
• Development of Surface Micromachined Mechanism for Movement Translation and Displacement Amplification
• Development of Electrothermal Actuator with Optimized Motion Characteristics
• Properties of Highly Resistive and Nonstoichiometric GaAs Film Grown by Low-temperature Metalorganic Chemical Vapor Deposition Using Tertiarybutylarsine
• Laser-Induced Activation of p-Type GaN with the Second Harmonics of a Nd:YAG Laser
• Development and Application of Lateral Comb-Drive Actuator
• Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators
• Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator
• Deposition and Characterization of Low-Stress Plasma Enhanced Chemical Vapor Deposition of Tetraethoxysilane Oxide for Micro-Electro-Mechanical-Systems Applications
• Development of Surface Micromachined Mechanism for Movement Translation and Displacement Amplification
• Development of Electrothermal Actuator with Optimized Motion Characteristics
• Development and Application of Lateral Comb-Drive Actuator

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