Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-06-30
著者
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Chen W‐c
National Cheng Kung Univ. Tainan Twn
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CHEN Wen-Chih
Optical Communication Division, Asia Pacific Microsystems, Inc.
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WU Chia-Yu
Optical Communication Division, Asia Pacific Microsystems, Inc.
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LEE Chengkuo
Optical Communication Division, Asia Pacific Microsystems, Inc.
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Chen Wen-Chih
Optical Communication Division, Asia Pacific Microsystems, Inc., No. 2, R&D Road VI, Science-Based Industrial Park, Hsinchu, Taiwan
関連論文
- Development of Electrothermal Actuator with Optimized Motion Characteristics
- Properties of Highly Resistive and Nonstoichiometric GaAs Film Grown by Low-temperature Metalorganic Chemical Vapor Deposition Using Tertiarybutylarsine
- Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators
- Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators