Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators

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概要

• 論文の詳細を見る

• We present a novel bi-stable microelectromechanical structure driven by a pair of one-directional movable electrothermal V-beam actuators for applications need latch functions, like optical switch and relay. In conjunction with the T-shaped end and buckle spring, the first V-beam actuator set can drive the in-plane moving reflective mirror from transmission state to switching state, while the second V-beam actuator set is able to return the reflective mirror from position of switching state to position of transmission state. Thus the bi-directional motion capability is realized by using a pair of V-beam actuator sets with opposite moving direction. The preliminary results prove its application feasibility.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-06-15

著者

• CHEN Wen-Chih

  Optical Communication Division, Asia Pacific Microsystems, Inc.

• WU Chia-Yu

  Optical Communication Division, Asia Pacific Microsystems, Inc.

• LEE Chengkuo

  Optical Communication Division, Asia Pacific Microsystems, Inc.

• Wu Chia-Yu

  Optical Communication Division, Asia Pacific Microsystems, Inc., No. 2, R&D Road VI, Science-Based Industrial Park, Hsinchu, Taiwan

• Lee Chengkuo

  Optical Communication Division, Asia Pacific Microsystems, Inc., No. 2, R&D Road VI, Science-Based Industrial Park, Hsinchu, Taiwan

• Chen Wen-Chih

  Optical Communication Division, Asia Pacific Microsystems, Inc., No. 2, R&D Road VI, Science-Based Industrial Park, Hsinchu, Taiwan

関連論文

• Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators
• Characterization of Bi-Stable Micromechanism Based on Buckle Spring and Electrothermal V-Beam Actuators

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