Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator

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This paper describes the new concept and design for a self-assembled variable optical attenuator (VOA) derived by using surface micromachining technology. A residual stress-induced flexure curved beam with corrugated trench anchors can lift up the reflective mirror shutter. This self-assembled reflective shutter can be driven by a set of scratch drive actuator (SDA), then slides into the spacing between input and output fiber ends. The attenuation range of proposed microelectromechanical systems (MEMS) VOA is determined by the vertical position of self-assembled pop-up polysilicon reflective shutter in which it is controlled by the value of applied dc voltage. This new VOA demonstrates continuous attenuation capability and wide attenuation range based on using an electrostatic actuator that is a new residual stress-induced flexure curved beam with corrugated-trench anchors. This device exhibits attenuation range of 70 dB and insertion loss less than 1 dB.
2004-06-15