Development of Electrothermal Actuator with Optimized Motion Characteristics

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概要

• 論文の詳細を見る

• In this paper, we give the reasons for the phenomenon of adhesion of U-shaped electrothermal actuators onto substrates which is commonly observed for such devices. Next, we identified a significant advantage for operating these U-shaped actuators on top of a polysilicon layer with a suitable pattern design. A thorough investigation on the deflection behavior of actuators with different dimensional parameters, i.e., cold arm width, flexural beam length and hot arm length, was carried out. Finally, we discussed the effects of electrostatic force on the actuator due to these parameters. Based on these analyses, we suggested optimized dimensions for the U-shaped actuator.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-06-15

著者

• Lin Yu-shen

  Asia Pacific Microsystems Inc.

• CHEN Wen-Chih

  Asia Pacific Microsystems, Inc.

• HUANG Ruey-Shing

  Institute of Electronics Eng., National Tsing Hua University

• Lai Yen-jyh

  Asia Pacific Microsystems Inc.

• Wu Chia-yu

  Asia Pacific Microsystems Inc.

• Lee Chengkuo

  Asia Pacific Microsystems Inc.

• Fang Weileun

  Institute Of Mems National Tsing Hua University

• Chen Chihchung

  Asia Pacific Microsystems Inc.

• Fang Weileun

  Institute of MEMS, National Tsing Hua University, Hsinchu, Taiwan

• Huang Ruey-Shing

  Institute of Electronics Eng., National Tsing Hua University, Hsinchu, Taiwan

• Chen Wen-Chih

  Asia Pacific Microsystems, Inc., No. 2, R&D Road VI, Science-Based Industrial Park, Hsinchu, Taiwan

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• Development and Application of Lateral Comb-Drive Actuator

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