Implementation of Complementary Metal--Oxide--Semiconductor Microelectromechanical Systems Lorentz Force Two Axis Angular Actuator
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概要
- 論文の詳細を見る
We present a novel dual-axis complementary metal--oxide--semiconductor (CMOS) microelectromechanical systems (MEMS) angular actuator driven by Lorentz force. The device has been successfully implemented using the Taiwan Semiconductor Manufacturing Company (TSMC) two-poly four-metal (2P4M) process. The current routing achieved with three metal layers enables independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36 and 2.26 kHz for the two axes.
- 2012-06-25
著者
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Fang Weileun
Institute Of Mems National Tsing Hua University
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Wu Chung-Lin
Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu 300, Taiwan
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Yip Ming-Chuen
Department of Power Mechanical Engineering, National Tsing Hua Uninersity, Hsinchu, Taiwan 300, R.O.C.
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Yip Ming-Chuen
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan
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Sun Chih-Ming
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu 300, Taiwan
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Wang Chuanwei
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 300, Taiwan
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Chang Chun-I
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu 300, Taiwan
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Fang Weileun
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu 300, Taiwan
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