Development and Application of Lateral Comb-Drive Actuator
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概要
- 論文の詳細を見る
A lateral comb-drive actuator with a thinned three-folded spring is proposed. This new actuator structure enables a large displacement under the same applied voltage as that for a traditional comb-drive actuator of folded spring. Thereof, in this paper, the new comb structure is applied as an actuator of optical switch and a variable optical attenuator. The promising results prove the feasibility of the design of the new comb structure.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-06-15
著者
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Lai Yen-jyh
Asia Pacific Microsystems Inc.
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Lee Chengkuo
Asia Pacific Microsystems Inc.
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Chen Chihchung
Asia Pacific Microsystems Inc.
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Chen Wenchih
Asia Pacific Microsystems Inc.
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Chen Wenchih
Asia Pacific Microsystems, Inc., No. 2, R&D Road VI, Science-Based Industrial Park, Hsinchu, Taiwan
関連論文
- Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator
- Development of Surface Micromachined Mechanism for Movement Translation and Displacement Amplification
- Development of Electrothermal Actuator with Optimized Motion Characteristics
- Development and Application of Lateral Comb-Drive Actuator
- Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator
- Development of Surface Micromachined Mechanism for Movement Translation and Displacement Amplification
- Development of Electrothermal Actuator with Optimized Motion Characteristics
- Development and Application of Lateral Comb-Drive Actuator