Development of Surface Micromachined Mechanism for Movement Translation and Displacement Amplification

概要

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Characteristics of motion and movement are key concerns for microactuators and microrobots. We propose a new surface micromachioned mechanism to transfer small in-plane motion or displacement into the out-of-plane amplified rotation or amplified vertical projected displacement. We have demonstrated the concept of using this micromechanism to optical switch and variable optical attenuator (VOA) applications. Experimental data confirm its function of transferring and amplifying in-plane motion and movement into out-of-plane motion and movement. Preliminary results prove this mechanism can drastically reduce the driving voltage, thus the reported VOA device only requires 3 volts dc load to achieve 37 dB attenuation range.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2004-06-15