Development and Application of Lateral Comb-Drive Actuator

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-06-30

著者

• LEE Chengkuo

  Asia Pacific Microsystems, Inc.

• LAI Yen-Jyh

  Asia Pacific Microsystems, Inc.

• CHEN Chihchung

  Asia Pacific Microsystems, Inc.

• Lai Yen-jyh

  Asia Pacific Microsystems Inc.

• CHEN Wenchih

  Asia Pacific Microsystems, Inc.

関連論文

• Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator
• Development of Surface Micromachined Mechanism for Movement Translation and Displacement Amplification
• Development of Electrothermal Actuator with Optimized Motion Characteristics
• Development and Application of Lateral Comb-Drive Actuator
• Scratch Drive Actuator Driven Self-assembled Variable Optical Attenuator
• Development of Surface Micromachined Mechanism for Movement Translation and Displacement Amplification
• Development of Electrothermal Actuator with Optimized Motion Characteristics
• Development and Application of Lateral Comb-Drive Actuator

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