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Department Of Nanomechanics Graduate School Of Engineering Tohoku University | 論文
- A high-resolution endoscope of small diameter using electromagnetically vibration of single fiber (特集 医療用MEMSデバイス)
- Preparation of Thin Lithium Niobate Layer on Silicon Wafer for Wafer-level Integration of Acoustic Devices and LSI
- Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Having a Corrugated Bridge(Passive Circuits/Components,Emerging Microwave Techniques)
- Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
- Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS
- Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS
- Electrostatically Controlled, Pneumatically Actuated Microvalve with Low Pressure Loss
- Ulitaprecision Machining Characteristics of Poly-Crystalline Germanium
- Ultraprecision Machining Characteristics of Poly-crystalline Germanium(Ultra-precision machining)
- Improvement of Ground Surface Roughness of Optical Materials by Means of Cutting Edge Truncation of Metal-Bonded Diamond Grinding Wheel(Superabrasive/new wheel grinding process)
- Experimental Study on the Ultraprecision Ductile Machinability of Single-Crystal Germanium
- Thermodynamic Study of Magnetic Field-Enhanced Nanocrystallisation in Amorphous Fe-Si-B(-Nb-Cu)
- MEMS as Key Components for Systems
- MEMS-based Air Turbine with Radial-inflow Type Journal Bearing
- C22 Study on Nonisothermal Glass Molding Press for Aspherical Lens(Ultra-precision machining)
- Modeling high-temperature glass molding process by coupling heat transfer and viscous deformation analysis
- Development of an electrorheological fluid-assisted polishing tool for micro-aspherical molding dies(M^4 processes and micro-manufacturing for science)
- Grain boundary migration in Fe-3mass%Si alloy bicrystals under a magnetic field
- A new bulk - micromachining using deep RIE and wet etching for an accelerometer
- Charging Method of Micropatterned Electrets by Contact Electrification Using Mercury