Huffman Craig | IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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概要
関連著者
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Huffman Craig
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Beyer Gerald
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Demuynck Steven
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Heylen Nancy
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Nancy Heylen
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Claes Martine
IMEC, 75 Kapeldreef, 3001 Leuven, Belgium
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Steven Demuynck
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Patrick Verdonck
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Kristof Croes
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Craig Huffman
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Vereecke Bart
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Herbert Struyf
ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan
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Herbert Struyf
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Struyf Herbert
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Kim Honggun
Samsung Electronics, San 16 Banwol-dong, Hwasung, Gyeonnggi-do, 445-701, Korea
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Darnon Maxime
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Versluijs Janko
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Claes Martine
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Vereecke Guy
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Verdonck Patrick
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Volders Henny
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Kellens Kristof
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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De Roest
ASM Belgium, Kapeldreef 75, B-3001, Belgium
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Sprey Hessel
ASM Belgium, Kapeldreef 75, B-3001, Belgium
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David De
ASM, Kapeldreef 75, B-3001 Leuven, Belgium
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David De
ASM Belgium, Kapeldreef 75, B-3001, Belgium
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Hessel Sprey
ASM, Kapeldreef 75, B-3001 Leuven, Belgium
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Hessel Sprey
ASM Belgium, Kapeldreef 75, B-3001, Belgium
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Martine Claes
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Henny Volders
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Kristof Kellens
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Samuel Suhard
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Janko Versluijs
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Guy Vereecke
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Julien Beynet
ASM Belgium, Kapeldreef 75, B-3001, Belgium
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Gerald P.
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Roest David
ASM, Kapeldreef 75, B-3001 Leuven, Belgium
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Hirofumi Arai
ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan
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Noboru Takamure
ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan
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Julien Beynet
ASM, Kapeldreef 75, B-3001 Leuven, Belgium
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Kiyohiro Matsushita
ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan
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Nobuyoshi Kobayashi
ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan
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Gerald Beyer
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Zsolt Tokei
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Pantouvaki Marianna
imec, Kapeldreef 75, B-3001 Leuven, Belgium
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Zhao Larry
INTEL assignee at imec, Kapeldreef 75, B-3001, Belgium
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Ono Yukiharu
Sumitomo Bakelite Co., Ltd., Yokohama 245-0052, Japan
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Nakajima Michio
Sumitomo Bakelite Co., Ltd., Yokohama 245-0052, Japan
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Nakatani Koji
Sumitomo Bakelite Co., Ltd., Yokohama 245-0052, Japan
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Baklanov Mikhail
imec, Kapeldreef 75, B-3001 Leuven, Belgium
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Vereecke Guy
IMEC, 75 Kapeldreef, 3001 Leuven, Belgium
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Bart Vereecke
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
著作論文
- Advanced Organic Polymer for the Aggressive Scaling of Low-$k$ Materials
- Integration and Dielectric Reliability of 30 nm Half Pitch Structures in Aurora\textregistered LK HM
- Dielectric Reliability of 50 nm Half Pitch Structures in Aurora\textregistered LK
- Integration of Porogen-Based Low-$k$ Films: Influence of Capping Layer Thickness and Long Thermal Anneals on Low-$k$ Damage and Reliability