Baklanov Mikhail | imec, Kapeldreef 75, B-3001 Leuven, Belgium

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概要

• Baklanov Mikhail R.の詳細を見る
• 同名の論文著者
• imec, Kapeldreef 75, B-3001 Leuven, Belgiumの論文著者

関連著者

• Baklanov Mikhail

  imec, Kapeldreef 75, B-3001 Leuven, Belgium

• Beyer Gerald

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Huffman Craig

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Verdonck Patrick

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Heylen Nancy

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Roest David

  ASM, Kapeldreef 75, B-3001 Leuven, Belgium

• Pantouvaki Marianna

  imec, Kapeldreef 75, B-3001 Leuven, Belgium

• Zhao Larry

  INTEL assignee at imec, Kapeldreef 75, B-3001, Belgium

• Ono Yukiharu

  Sumitomo Bakelite Co., Ltd., Yokohama 245-0052, Japan

• Nakajima Michio

  Sumitomo Bakelite Co., Ltd., Yokohama 245-0052, Japan

• Nakatani Koji

  Sumitomo Bakelite Co., Ltd., Yokohama 245-0052, Japan

• Besien Els

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

• Vanstreels Kris

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

• Trompoukis Christos

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

• Urbanowicz Adam

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

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著作論文

• Influence of the UV cure on advanced plasma enhanced chemical vapour deposition low-k materials (Special issue: Advanced metallization for ULSI applications)
• Advanced Organic Polymer for the Aggressive Scaling of Low-$k$ Materials

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