Besien Els | imec, Kapeldreef 75, 3001 Heverlee, Belgium

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概要

• 同名の論文著者
• imec, Kapeldreef 75, 3001 Heverlee, Belgiumの論文著者

関連著者

• Verdonck Patrick

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Roest David

  ASM, Kapeldreef 75, B-3001 Leuven, Belgium

• Baklanov Mikhail

  imec, Kapeldreef 75, B-3001 Leuven, Belgium

• Besien Els

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

• Vanstreels Kris

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

• Trompoukis Christos

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

• Urbanowicz Adam

  imec, Kapeldreef 75, 3001 Heverlee, Belgium

著作論文

• Influence of the UV cure on advanced plasma enhanced chemical vapour deposition low-k materials (Special issue: Advanced metallization for ULSI applications)

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