Verdonck Patrick | IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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概要
関連著者
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Verdonck Patrick
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Beyer Gerald
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Struyf Herbert
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Demuynck Steven
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Kim Honggun
Samsung Electronics, San 16 Banwol-dong, Hwasung, Gyeonnggi-do, 445-701, Korea
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Huffman Craig
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Darnon Maxime
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Versluijs Janko
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Claes Martine
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Vereecke Guy
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Volders Henny
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Heylen Nancy
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Kellens Kristof
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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De Roest
ASM Belgium, Kapeldreef 75, B-3001, Belgium
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Sprey Hessel
ASM Belgium, Kapeldreef 75, B-3001, Belgium
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Claes Martine
IMEC, 75 Kapeldreef, 3001 Leuven, Belgium
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Roest David
ASM, Kapeldreef 75, B-3001 Leuven, Belgium
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Baklanov Mikhail
imec, Kapeldreef 75, B-3001 Leuven, Belgium
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Vereecke Guy
IMEC, 75 Kapeldreef, 3001 Leuven, Belgium
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Besien Els
imec, Kapeldreef 75, 3001 Heverlee, Belgium
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Vanstreels Kris
imec, Kapeldreef 75, 3001 Heverlee, Belgium
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Trompoukis Christos
imec, Kapeldreef 75, 3001 Heverlee, Belgium
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Urbanowicz Adam
imec, Kapeldreef 75, 3001 Heverlee, Belgium
著作論文
- Influence of the UV cure on advanced plasma enhanced chemical vapour deposition low-k materials (Special issue: Advanced metallization for ULSI applications)
- Dielectric Reliability of 50 nm Half Pitch Structures in Aurora\textregistered LK