Gerald Beyer | IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

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概要

• Gerald Beyer の詳細を見る
• 同名の論文著者
• IMEC, Kapeldreef 75, B-3001 Leuven, Belgiumの論文著者

関連著者

• Vereecke Bart

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Herbert Struyf

  ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan

• Huffman Craig

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• David De

  ASM, Kapeldreef 75, B-3001 Leuven, Belgium

• Hessel Sprey

  ASM, Kapeldreef 75, B-3001 Leuven, Belgium

• Nancy Heylen

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Steven Demuynck

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Patrick Verdonck

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Kristof Croes

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Roest David

  ASM, Kapeldreef 75, B-3001 Leuven, Belgium

• Hirofumi Arai

  ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan

• Noboru Takamure

  ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan

• Julien Beynet

  ASM, Kapeldreef 75, B-3001 Leuven, Belgium

• Kiyohiro Matsushita

  ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan

• Nobuyoshi Kobayashi

  ASM, 23-1 Nagayama 6-chome, Tama, Tokyo 206-0025, Japan

• Gerald Beyer

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Zsolt Tokei

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Craig Huffman

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Bart Vereecke

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

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著作論文

• Integration of Porogen-Based Low-$k$ Films: Influence of Capping Layer Thickness and Long Thermal Anneals on Low-$k$ Damage and Reliability

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