SAITO Tatsuyuki | Micro Device Division, Hitachi Ltd.

Akita Prefectural University

Hitachi Research Laboratory, Hitachi Ltd.

Dep. Of Materials Sci. And Engineering Ibaraki Univ.

Akita Prefectural Univ. Honjo Jpn

Central Research Laboratory Hitachi Ltd.

Department of Electronics and Information Systems, Faculty of Systems Science and Technology, Akita

Graduate School Of Science And Engineering Ibaraki University

Hitachi Kyowa Engineering Ltd.

Department Of Physics Faculty Of Sciense And Technology Science University Of Tokyo

Department of Materials Science and Engineering, Ibaraki University

Micro Device Division, Hitachi Ltd.

Intellexres Laboratory

Micro Device Division Hitachi Ltd.

Hitachi Research Laboratory Hitachi Ltd.

Semiconductor And Integrated Circuits Division Hitachi Ltd.

Department Of Computational Science Kanazawa University

Hitachi Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan

Hitachi Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan

Department of Materials Science and Engineering Ibaraki University, Hitachi, Ibaraki 316-8511, Japan

Department of Materials Science and Engineering, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan

Department of Electronics and Information System, Faculty of System Science and Technology, Akita Prefectural University, Honjyo, Akita 015-0055, Japan

Department of Materials Science and Engineering, Ibaraki University, Hitachi, Ibaraki 316-8511, Japan

Micro Device Division, Hitachi, Ltd., Ome, Tokyo 198-8512, Japan

Department of Chemistry, Faculty of Science, The University of Tokyo

Hitachi Kyowa Engineering, Ltd., Hitachi, Ibaraki 319-1292, Japan