NAGANO Takahiro | Intellexres Laboratory
スポンサーリンク
概要
関連著者
-
Onuki Jin
Department Of Electronic And Information Systems Faculty Of Systems Science And Technology Akita Pre
-
Akahoshi Haruo
Hitachi Research Laboratory Hitachi Ltd.
-
NAGANO Takahiro
Intellexres Laboratory
-
Khoo Khyoupin
Department Of Materials Science And Engineering Ibaraki University
-
Chonan Yasunori
Department Of Electronics And Information System Faculty Of System Science And Technology Akita Pref
-
ONUKI Jin
Department of Materials Science and Engineering, Ibaraki University
-
Onuki Jin
Akita Prefectural University
-
Koizumi M
Department Of Electronics And Information Systems Faculty Of Systems Science And Technology Akita Pr
-
AKAHOSHI Haruo
Hitachi Research Laboratory, Hitachi Ltd.
-
Onuki J
Dep. Of Materials Sci. And Engineering Ibaraki Univ.
-
Onuki J
Akita Prefectural Univ. Honjo Jpn
-
Nishida Takashi
Central Research Laboratory Hitachi Ltd.
-
KOMIYAMA Takao
Department of Electronics and Information Systems, Faculty of Systems Science and Technology, Akita
-
CHONAN Yasunori
Department of Electronics and Information Systems, Faculty of Systems Science and Technology, Akita
-
Khoo Khyoupin
Graduate School Of Science And Engineering Ibaraki University
-
Komiyama Takao
Department Of Electronic And Information Systems Faculty Of Systems Science And Technology Akita Pre
-
Nagano Tomohiro
Department Of Physics Faculty Of Sciense And Technology Science University Of Tokyo
-
KHOO Khyoupin
Department of Materials Science and Engineering, Ibaraki University
-
SAITO Tatsuyuki
Micro Device Division, Hitachi Ltd.
-
ITABASHI Takeyuki
Advanced Research Laboratory, Hitachi Ltd.
-
SAITO Tatuyuki
Hitachi, Ltd., Hitachi Device Development Center
-
Saito Tatuyuki
Micro Device Division Hitachi Ltd.
-
Haba Toshio
Hitachi Research Laboratory Hitachi Ltd.
-
Nagano Takahiro
Semiconductor And Integrated Circuits Division Hitachi Ltd.
-
Aoyama Takashi
Department Of Computational Science Kanazawa University
-
Itabashi Takeyuki
Advanced Research Laboratory Hitachi Ltd.
-
Haba Toshio
Hitachi Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan
-
Akahoshi Haruo
Hitachi Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan
-
Khoo Khyoupin
Department of Materials Science and Engineering Ibaraki University, Hitachi, Ibaraki 316-8511, Japan
-
Aoyama Takashi
Department of Chemistry, Faculty of Science, The University of Tokyo
著作論文
- Filling a Narrow and High Aspect-Ratio Trench with Electro-Cu Plating
- Filling 80-nm-Wide and High-Aspect-Ratio Trench with Pulse Wave Copper Electroplating and Observation of the Microstructure