Sakata Shuichi | Department Of Materials Engineering School Of Engineering The University Of Tokyo

Institute of Industrial Science and INQIE, University of Tokyo, Meguro, Tokyo 153-8505, Japan

Institute of Industrial Science and INQIE, University of Tokyo, Meguro, Tokyo 153-8505, Japan

Institute of Industrial Science and INQIE, University of Tokyo, Meguro, Tokyo 153-8505, Japan

Department of Materials Science, Graduate School of Engineering, The University of Tokyo

Department of Materials Science, Graduate School of Engineering, The University of Tokyo

Department Of Materials Engineering School Of Engineering The University Of Tokyo

Department Of Materials Engineering School Of Engineering The University Of Tokyo

Mirai-advanced Semiconductor Research Center (mirai-asrc) National Institute Of Advanced Industrial

Univ. Tokyo Tokyo Jpn

The Authors Are With Advanced Lsi Technology Laboratory Toshiba Corporation:presently With The Depar

Advanced Lsi Technology Toshiba Corporation

Department Of Applied Physics University Of Tokyo

Department of Materials Engineering, School of Engineering, The University of Tokyo

Department of Materials Engineering, School of Engineering, The University of Tokyo

Department of Materials Engineering, School of Engineering, The University of Tokyo

Department Of Zoology Graduate School Of Science Kyoto University

Department Of Zoology Faculty Of Science Kyoto University

Advanced Lsi Technology Laboratory Research & Development Center Toshiba Co.

Department Of Materials Engineering The University Of Tokyo

Department Of Materials Engineering The University Of Tokyo

Department Of Materials Engineering The University Of Tokyo

Mirai-asrc Aist

Department Of Chemistry Faculty Of Science Okayama University

Department of Zoology, Graduate School of Science, Kyoto University

Department of Material Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan